High precision off-axis aspherical mirror processing case
The following is an example of a 320mmx110mm off-axis paraboloid
The Luphoscan accuracy was PV=0.169 λ and RMS=0.016 λ. The interferometer autocollimation detection reaches PV=0.21 λ,
RMS=0.016 λ roughness Rq=0.31nm, the finish is better than 10/5
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